The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 09, 1991

Filed:

Sep. 14, 1988
Applicant:
Inventors:

Kiyoshi Nagasawa, Ibaragi, JP;

Kozo Ono, Toride, JP;

Kojiro Ogata, Ishioka, JP;

Ken Murayama, Ibaragi, JP;

Yoshihiro Hoshino, Tsuchiura, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
33573 ; 33568 ; 33 / ; 318646 ;
Abstract

A controller for a fine positioning device constructed of planar structural units connected symmetrically and equipped individually with planar flexible beams arranged in an opposing relation between two rigid members and actuators for applying forces between the two rigid members includes displacement detection devices, displacement setting devices, sensor devices for determining the degree of each translational displacement and the degree of each angular displacement, and control devices for controlling the voltages to be applied to the respective actuators.


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