The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 1991
Filed:
Mar. 14, 1990
Applicant:
Inventors:
Shuji Okada, Tsukuba, JP;
Hiro Matsuda, Tsukuba, JP;
Hachiro Nakanishi, Tsukuba, JP;
Masao Kato, Tsukuba, JP;
Assignees:
Agency of Industrial Science & Technology, Tokyo, JP;
Ministry of International Trade & Industry, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ; H05G / ; G01B / ;
U.S. Cl.
CPC ...
378 70 ; 378 71 ; 378 89 ; 378 54 ; 378 55 ;
Abstract
A thickness determination method for organic films comprises the steps of: irradiating an organic film to be measured with x-rays at a certain angle of incidence, finding an angle of reflection at which the x-ray intensity reaches a peak, and finding the thickness of the film from the angle of this peak.