The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 1991
Filed:
Nov. 17, 1989
Steven Murdoch, Palo Alto, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A combination gate valve and throttle valve is presented for use between a process chamber and at least one pump includes a base plate a lower plate and a gate plate. The base plate is attached to the process chamber and includes a base plate gas port for each pump in the system. Each pump is attached to the lower plate. Where each pump is attached to the lower plate there is a lower plate gas port. Each of the lower plate gas ports lines up with one of the base plate gas ports. The gate plate is attached between the lower plate and the base plate. The gate plate has gate plate gas ports so that when the gate plate is moved into an open position with respect to the base plate and the lower plate, the gate plate gas ports line up with the lower plate gas ports and the base plate gas ports allowing gas to flow from the process chamber through the gas ports to the pumps. When the gate plate is moved into a closed position the process chamber is selaed from the pumps. The process chamber is now isolated from the pumps allowing the pumps to be removed without contaminating the process chamber.