The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 1991
Filed:
May. 29, 1990
Kazuo Iizuka, Yokohama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A reticle conveying system includes a reticle keeping shelf for keeping therein a plurality of reticles; a first conveying portion for selecting and extracting a desired reticle out of the reticle keeping shelf and for conveying the extracted reticle to a predetermined position; and a second conveying portion for conveying the reticle from the predetermined position back into the reticle keeping shelf; wherein the first conveying portion is operable to convey the extracted reticle to the predetermined position by way of a first conveying path defined exclusively for the reticle as it is conveyed to the predetermined position and wherein said second conveying portion is operable to convey the reticle back into the reticle keeping shelf by way of a second conveying path different from the first conveying path and defined exclusively for the reticle as it is conveyed back into the reticle keeping shelf.