The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 1991
Filed:
Aug. 29, 1989
Seiko Instruments Inc., , JP;
Abstract
In a tunneling unit of a scanning tunneling microscope (STM), a rough feed mechanism for approaching a sample and a probe to a tunnel area is disposed separately (or is provided to a stage on a sample side, for example), a fine movement element block is formed as a separate unit and the tunnel unit main body is made compact and provided with high rigidity so that it can be mounted to an optical microscope or a laser microscope. If the fine movement element block of the tunnel unit is mounted to a revolver of an optical microscope or the like, rotation positioning accuracy of the revolver is a few microns. Therefore, high precision positioning of the position to be observed by STM can be attained by optical means and measurement having high resolution in an nm order can be conducted by use of STM. Since STM can be mounted to an existing apparatus in accordance with the present invention, measurement accuracy can be improved drastically and the invention is extremely useful industrially.