The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 12, 1991

Filed:

Jul. 31, 1989
Applicant:
Inventors:

David R Mattson, Maple Bluff, WI (US);

Joel Covey, Madison, WI (US);

Stephen Weibel, Madison, WI (US);

Assignee:

Mattson Instruments, Inc., Madison, WI (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356346 ;
Abstract

A dual beam Fourier transform spectrometer produces two beams from a single infrared (IR) source. The beams are directed through a sample region, with one beam transiting a sample and the other beam transiting a reference cell. The sample and reference beams are then directed to a Michelson interferometer with cube corner retroflectors for optically cancelling the background signal from the separate sample and reference beams and for optically combining the sample and reference beams in an optically accurate and stable manner. The single combined beam, which contains the difference interferogram is directed to a single detector.


Find Patent Forward Citations

Loading…