The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 12, 1991

Filed:

Jan. 10, 1990
Applicant:
Inventors:

Nobuyuki Osakabe, Kodaira, JP;

Akira Tonomura, Koganei, JP;

Assignee:

Hitachi, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03H / ;
U.S. Cl.
CPC ...
350-38 ; 350-36 ; 250306 ; 250311 ;
Abstract

An apparatus forming a reflection electron hologram, wherein a fraction of an electron wave from an electron source illuminate a specimen and caused to be reflected thereat, the remaining electron wave does not illuminate the specimen, but passes aside, the specimen, and the electron wave reflected from the specimen and the electron wave not illuminating, but passes aside, the specimen, are superimposed one upon the other.


Find Patent Forward Citations

Loading…