The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 19, 1991

Filed:

Nov. 06, 1989
Applicant:
Inventors:

Hiroo Fujita, Sayama, JP;

Kazuo Takahashi, Komoro, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ; G01B / ;
U.S. Cl.
CPC ...
364561 ; 364560 ; 250560 ; 356398 ; 356394 ;
Abstract

In micro-dimensional measurement apparatus including an optical scanning system and a processor for optical data obtained therefrom the measurement is based upon a comparison of previously prepared reference data and optical data from an object to be measured, and features use of a twin laser beam in the scanning operation.


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