The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 1991
Filed:
Jul. 31, 1989
Applicant:
Inventor:
Marlo E Cota, Scottsdale, AZ (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
A47G / ;
U.S. Cl.
CPC ...
211 41 ; 432253 ;
Abstract
An improved carrier for holding semiconductor wafers at a predetermined angle during processing is described having side rails with slots for holding lateral edges of the wafer and bottom slots having a curved floor for supporting the wafer edge without substantially contacting the corners of the wafer where the wafer edge and principal wafer surfaces join. This reduces yield loss due to wafer edge chipping. The side slots are desirably off-set from corresponding bottom slots so that the wafers will be consistently oriented at the predetermined angle and have uniform spacing.