The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 1991
Filed:
Jan. 13, 1989
Applicant:
Inventors:
Assignee:
Commissariat A l'Energie Atomique, Paris, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J / ;
U.S. Cl.
CPC ...
356402 ; 356419 ; 382 65 ;
Abstract
This invention concerns a method for optimizing contrast in an image of a sample. This sample (5) comprises a whole number of zones having different reflection or transmittance factors. These zones are illuminated by a light source (7) and the image is obtained at the output of an optical system (4) to be analyzed by a sensor (10) supplying on the outputs recording signals of this image. Contrast optimization consists of determining the characteristics of an optimal fiber to be inserted between the source (7) and the sample (5) to be controlled. Application in particular for the control of in-production integrated circuits.