The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 12, 1991

Filed:

Sep. 14, 1988
Applicant:
Inventors:

Kiyoshi Nagasawa, Ibaragi, JP;

Kozo Ono, Toride, JP;

Kojiro Ogata, Ishioka, JP;

Ken Murayama, Chiyoda, JP;

Yoshihiro Hoshino, Tsuchiura, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23Q / ; G01B / ;
U.S. Cl.
CPC ...
33568 ; 33573 ; 33 / ; 318646 ;
Abstract

A fine positioning device is formed of a rigid support member; a first set of radial flexible-beam displacement mechanisms provided symmetrically to each other on the support member to produce angular displacements about a first axis; a second set of radial flexible-beam displacement mechanisms provided symmetrically to each other on the support member to produce angular displacements about a second axis which is perpendicular to the first axis; a third set of radial flexible-beam displacement mechanisms connected to either one of the sets of radial flexible-beam displacement mechanisms to produce angular diaplacements about a third axis which is perpendicular to both the first and second axes; and a fine motion table fixed on the radial flexible-beam displacement mechanisms which are other than those connected to the radial flexible-beam displacement mechanisms for producing angular displacements about the third axis.


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