The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 1991
Filed:
Jul. 31, 1989
Applicant:
Inventor:
Kazunori Onozawa, Takasaki, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 47 ; 437 47 ; 437 60 ; 437918 ; 437 31 ; 437 34 ;
Abstract
A semiconductor integrated circuit device having resistance elements having reduced fluctuation of their resistance values and a fabrication method thereof are disclosed. More definitely, a protective film made of a gate electrode material of MISFETs formed on the main plane of a semiconductor substrate is disposed through an insulator film on the upper surface of the resistance elements comprising a semiconductor region which is formed by introducing an impurity of a first conductivity type into the main plane of the same semiconductor substrate.