The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 1991
Filed:
May. 24, 1989
Rudolf Wagner, Fontnas, CH;
Bader Martin, Balzers, LI;
Moll Eberhard, Schellenberg, LI;
Renzo Zanardo, Balzers, LI;
J G Van Agtmaal, Hilversum, NL;
Balzers Aktiengesellschaft, Balzers, LI;
Abstract
A vacuum apparatus for treating disk-shaped workpieces includes a central distribution chamber into which the workpieces are brought from a lock through a communication opening which can be closed by a closing member. A transporting mechanism, preferably in the form of a robot arm, is located in the distribution chamber which is adjoined by intermediate chambers distributed along its circumference as exchangeable modules whereby the communication between them can be shut off at each point of connection by a closing member. An intermediate chamber communicates with at least one treatment chamber via an allocated communication opening which, in order to allow a separation of the treatment chamber, is accessible from the intermediate chamber. In the intermediate chamber a further transport mechanism is arranged for taking over the workpieces from the first transport mechanism, which further transport mechanism places the workpieces onto an elevating table located under the treatment chamber. The table forwards the workpiece into the allocated treatment chamber and separates it thereby at the same time from the distribution chamber. Preferably a plurality of treatment chambers are allocated to each intermediate chamber. The closing members at the communication openings between the chambers are controlled during the treatment procedures so that no undesired passing of gases and particles from one treatment station into the other is possible.