The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 1991
Filed:
May. 17, 1988
Charles W Garrett, Somerville, AL (US);
William H Robinson, Jr, Huntland, TN (US);
Dennis A Sierk, Huntsville, AL (US);
SCI Systems, Inc., Huntsville, AL (US);
Abstract
Means are provided for adjustably setting and determining the time duration of flow of a purge gas through process gas supply conduits which supply process gases to semiconductor manufacturing operations. These features are used advantageously to facilitate the changing of certain components of the system, such as a tank of toxic process gas, and/or a filter. A plurality of gas storage and distribution cabinets can be controlled from a single remote personal computer. Alternatively, each individual unit can be controlled by means of its own control system. Setpoints defining, for example, time intervals and pressures to be used in controlling the functions of the gas cabinets may be selected and entered through a front panel on the gas cabinet, or through the remote terminal. A print-out of the selected setpoints is provided by the terminal for improved record keeping of safety procedures used. The invention increases the safety of operation of the gas distribution system, and particularly the safety of the component changing procedures, and reduces the time and cost of such procedures, while improving the records kept regarding safety and other operations of the system.