The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 15, 1991
Filed:
Aug. 16, 1989
Applicant:
Inventor:
Noriyuki Kondo, Kyoto, JP;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ; G01B / ;
U.S. Cl.
CPC ...
356382 ; 356381 ; 356355 ; 356357 ;
Abstract
A method of and an apparatus for measuring the thickness of a first thin film which is the uppermost layer of a sample formed by two or more stacked thin films. Light is transmitted through the first thin film but absorbed by a second thin film positioned directly under the first thin film. The spectrum of light reflected by the sample is detected to obtain the thickness of the first thin film.