The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 1990
Filed:
Jun. 01, 1989
Applicant:
Inventors:
Nobuyoshi Murai, Sakai, JP;
Yoshinori Takahashi, Tondabayashi, JP;
Kazuyoshi Katayama, Nishinomiya, JP;
Assignee:
Takenaka Corporation, A Japanese Corporation, Osaka, JP;
Primary Examiner:
Int. Cl.
CPC ...
F16F / ;
U.S. Cl.
CPC ...
267136 ; 188378 ; 248550 ;
Abstract
A damping support structure for preventing vibrations of an apparatus table supporting an apparatus for manufacturing ultra-high precision devices such as semiconductors and printed circuit boards. The apparatus table is supported by a support deck suspended to be horizontally displaceable. Linear motors are actuated in response to vibrations of the apparatus table detected by vibration sensors. The apparatus table is thus displaceable relative to a stationary section, to be safeguarded against the vibrations.