The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 1990
Filed:
Mar. 16, 1988
Applicant:
Inventors:
Masahiko Miyamoto, Tokyo, JP;
Nobuo Nakamura, Yokohama, JP;
Jyunji Takashita, Yokohama, JP;
Manabu Ando, Yokohama, JP;
Katsuo Kawano, Kawasaki, JP;
Yoshiaki Nishimura, Yokohama, JP;
Satoshi Yuasa, Yokohama, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B / ;
U.S. Cl.
CPC ...
51 55 ; 5112 / ; 51126 ; 5116575 ;
Abstract
There is disclosed a polishing apparatus utilizing a gel material as the polishing tool, in which the gel material is rotated in the vicinity of a surface to be polished, or is given rotating and rocking motions in direct contact with the surface to be polished.