The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 1990
Filed:
Aug. 11, 1989
Tomoyuki Tobita, Katsuta, JP;
Akira Sase, Katsuta, JP;
Yoshimi Yamamoto, Naka, JP;
Satoshi Shimada, Hitachi, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A semiconductor pressure converting device including a fixing table joined to a silicon diaphragm consists of 2 structures superposed on each other, in which the longitudinal elastic modulus of the first fixing table is significantly different from the longitudinal elastic modulus of the semiconductor diaphragm. The first fixing table is highly insulating and the linear expansion coefficient thereof is approximately equal to the linear expansion coefficient of the semiconductor diaphragm. The second fixing table is made of a material having a longitudinal elastic modulus and a linear expansion coefficient approximately equal to those of the semiconductor diaphragm.