The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 1990
Filed:
Dec. 16, 1988
Applicant:
Inventor:
Masaaki Kinugawa, Tokyo, JP;
Assignee:
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 67 ; 437 60 ; 437 63 ; 437 64 ; 437203 ; 437918 ; 437919 ;
Abstract
A semiconductor device comprising a semiconductor substrate having a principal surface constituted by crystal plane (100) formed with a groove, which is utilized for an element isolation region, a capacitor element, etc., wherein at least one of the side wall surfaces of the groove is constituted by a (100) crystal plane. There is also proposed a method of forming a groove having at least one crystal plane side surface in a crystal plane surface of a semiconductor substrate.