The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 1990
Filed:
Apr. 27, 1989
Gernot Thorn, Hanau, DE;
Leybold Aktiengesellschaft, Hanau, DE;
Abstract
The invention concerns apparatus for the non-destructive measurement of the ohmic resistance of thin layers. The apparatus is based on a capacitative measurement process wherein the plates of a capacitor are formed by an electrode (3) with the thin layer (6) to be measured, the dielectric of the capacitor being constituted by a carrier foil (5) on which the thin layer (6) is carried, for instance by means of a vacuum-depositing process. The electrode (3) is supplied via an oscillator with high-frequency voltage (U.sub.HF) so that a displacement current flows from the electrode (3) over the carrier foil (5) to the thin layer (6) and from there back again. This displacement current is composed of an ohmic part and a capacitive part. In order to maintain the capacitative part constant even for fluctuating capacitances, caused e.g. by changes in the thickness of the carrier foil (5), an additional capacitor is connected in a regulated manner to the capacitor that is present.