The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 1990
Filed:
Jun. 29, 1989
Applicant:
Inventor:
George R Misium, Richardson, TX (US);
Assignee:
Texas Instruments Incorporated, , DE (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
2504922 ; 250398 ;
Abstract
An electrical field-enhanced electron image projector (10) is exposed to an electrical field source (26) to induce the emission of electrons (20) which flow across a gap (28) from a pattern (14) of mask (12) to a photoresist layer (18) of a substrate (16). A heat source (22) can be applied to increase the flow of electrons (20) from the pattern (14) to the photoresist layer (18). As the gap (28) distance decreases, the ability of electrons (20) to move from the pattern (14) to the photoresist layer (18) increases.