The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 1990
Filed:
Mar. 13, 1989
Werner Kuhlmann, Munich, DE;
Siemens Aktiengesellschaft, Berlin and Munich, DE;
Abstract
A method is provided for the fabrication of a photodiode sensitive to blue light. This photodiode has a very flat pn junction (2) in order to achieve a high blue sensitivity. The pn-junction (2) is formed in an n-conducting (100)-oriented silicon monocrystal (1) through implantation of B.sup.+ ions. Subsequently, an upper layer (3) generated during the implantation with relatively low p-doping is eroded through anisotropic etching to extend into a region of a deeper lying layer (4) having a relatively high p.sup.+ -doping. This high p.sup.+ -doping layer is then located to provide high sensitivity of the silicon photodiodes light corresponding to blue in the visual spectrum.