The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 1990
Filed:
Jan. 12, 1990
Applicant:
Inventors:
Assignee:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; B44C / ; C23F / ; C03C / ;
U.S. Cl.
CPC ...
156643 ; 156646 ; 156651 ; 156656 ; 156657 ; 1566591 ; 1566611 ; 156662 ; 20419235 ; 20419237 ; 252 791 ;
Abstract
In the production of micron-size pyramid emitters for field emission devices, very sharp emitter points are achieved by providing a layer of suitable metal, metal compound or semiconductor, forming masking pads over the required emitter positions, etching the layer so that column-like structures are formed beneath the pads, removing the pads, and then subjecting the columns to dry etching, such as plasma etching, reactive ion etching, ion beam milling or reactive ion beam milling. The dry etching process shapes the columns into pyramids with a tip size of the order of 0.03 microns.
Jacobson, Susan. (1990). Electronic devices (U.S. Patent No. 4968382). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4968382
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile