The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 30, 1990

Filed:

Sep. 16, 1988
Applicant:
Inventor:

Hans D Brust, Dudweiler, DE;

Assignee:

Siemens Aktiengesellschaft, Berlin and Munich, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R / ; G01R / ;
U.S. Cl.
CPC ...
3241 / ; 3241 / ;
Abstract

In the method and apparatus for the phase measurement of arbitrary signals at a measuring point, for example, of surface waves on piezoelectrical substrates, the surface waves are excited on the surface of a specimen having piezoelectrical features. The measuring point on the specimen surface is scanned by a particle beam and a secondary electrical signal at the measuring point is supplied to an evaluation circuit via a detector. A phase detector within the evaluation circuit is operated in a linear region of its output characteristic curve with the use of a feedback. This makes it possible to keep the phase at the phase detector constant. The phase of the signal to be examined, for example, of the surface wave, which is produced at a interdigital transducer is influenced due to the feedback.


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