The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 1990
Filed:
Apr. 12, 1990
Roberto Dell'Acqua, Pavia, IT;
Marelli Autronica S.p.A., Milan, IT;
Abstract
An electrical force and/or deformation sensor includes a support structure constituted by a rigid plate in one face of which a recess is formed. The bottom wall of the recess is thin and is resiliently deformable under the action of a force or pressure to be measured. At least one piezoresistive sensitive element constituted by a thick-film resistor is applied to the other face of the plate in correspondence with the recess. Electrical conductor elements connected to the sensitive element or elements are also applied to this face of the plate to enable its connection to supply and processing circuits. These circuits may conveniently be produced by thick- or thin-film hybrid circuit technology on the same face of the support plate as that which carries the piezoresistive element or elements. In order to measure absolute pressure, the inlet opening of the recess may be closed by a gas-tight seal so as to define a closed cavity in the thickness of the plate, in which a vacuum is formed.