The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 1990
Filed:
Feb. 13, 1989
Applicant:
Inventors:
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
505-1 ; 20419224 ; 20429807 ; 20429813 ; 505731 ;
Abstract
A method and apparatus for producing thin superconductor film of high temperature oxide type ceramic superconductors by cathodic sputtering and in which the highest possible oxygen partial pressure is utilized in the space between the cathode and the substrate. Ionizing radiation can be introduced into the space as well.