The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 1990
Filed:
Dec. 27, 1988
Applicant:
Inventor:
Charles C Payne, Aurora, IL (US);
Assignee:
Nalco Chemical Company, Naperville, IL (US);
Primary Examiner:
Int. Cl.
CPC ...
B08B / ; C11D / ; C11D / ; C11D / ;
U.S. Cl.
CPC ...
134-2 ; 134 38 ; 134 42 ; 252 791 ; 252 795 ; 252156 ; 252173 ; 252541 ; 252545 ; 252547 ; 252D / ; 430327 ; 430331 ;
Abstract
Composition of matter and method of cleaning silicon wafers; the composition of matter is an aqueous solution of potassium hydroxide and a nitrogen-containing compound, preferably tetramethylammonium hydroxide. The wafer is immersed in the solution, rinsed and dried.