The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 1990
Filed:
Sep. 27, 1988
Applicant:
Inventors:
Hans P Kleinknecht, Bergdietikon, CH;
Karl H Knop, Zurich, CH;
Assignee:
General Electric Company, Somerville, NJ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356357 ; 356355 ;
Abstract
A dimension of an object disposed on a substrate, such as the width of a line of material deposited on a substrate in an integrated circuit manufacturing procedure, is measured by directing a plane wave of electromagnetic energy of predetermined dimensions toward the object at a predetermined angle of incidence. Electromagnetic energy scattered from two predetermined parts or features, such as the edges, of the object are combined so that they produce an interference pattern in space varying between maxima and minima. The characteristics of the interference pattern permit the dimension of the object to be deduced.