The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 1990
Filed:
Feb. 21, 1989
John W Gray, Ware, MA (US);
Galileo Electro-Optics Corps., Sturbridge, MA (US);
Abstract
Scanning electron microscopy apparatus employing a detector to detect emission of electrons resulting from the impingement of electrons of an electron beam on an object being viewed, the apparatus including an electron beam source providing the electron beam, a magnet providing a magnetic field to direct the electron beam to the object, a first microchannel plate having a first hole through it aligned with the electron beam, a first surface directed toward the electron beam source for receiving low energy electrons that have been emitted from the object and directed through the hole by the magnetic field, a second surface on the opposite side of side first microchannel plate for discharge of multiplied electrons, and a first anode facing the second surface, the first anode being positioned to collect electrons discharged from the second surface.