The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 1990
Filed:
Dec. 18, 1989
Applicant:
Inventors:
Kenji Ando, Kawasaki, JP;
Osamu Kamiya, Machida, JP;
Masao Sugata, Yokohama, JP;
Noriko Kurihara, Tokyo, JP;
Hiroyuki Sugata, Atsugi, JP;
Tohru Den, Tokyo, JP;
Toshiaki Kimura, Sagamihara, JP;
Takashi Hamamoto, Yokohama, JP;
Masahiro Haruta, Tokyo, JP;
Kuniji Osabe, Kawasaki, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118719 ; 118723 ; 118730 ; 118308 ; 118310 ; 4272557 ; 427 451 ;
Abstract
A device for blowing fine particles is provided which comprises a plural number of upstream chambers for jetting out fine particles provided against a movable substrate. Each of the upstream chambers may be provided with a gas exciter, and also may be provided with an energy imparter for imparting energy to the substrate.