The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 1990
Filed:
Dec. 24, 1987
Applicant:
Inventor:
Zachary Lemnios, Colorado Springs, CO (US);
Assignee:
Ford Microelectronics, Inc., Colorado Springs, CO (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
357 15 ; 357 22 ; 437176 ; 437177 ; 437178 ;
Abstract
A method and resulting circuit structure (10) are disclosed for sputtering metallic silicide gates (18) on gallium arsenide integrated circuit structures. Silicon and metallic layers (14,15,14') are sputtered onto a gallium arsenide substrate (12) for stable high-temperature gate metallizations on VLSI structures.