The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 1990
Filed:
Oct. 27, 1988
Applicant:
Inventors:
Harold R Kaufman, Fort Collins, CO (US);
Raymond S Robinson, Fort Collins, CO (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
31511181 ; 31323131 ;
Abstract
A cathode has a pair of cavities in which are disposed respective electrically isolated electrodes. An inert gas is introduced individually into the cavities. Individually outletting from those cavities are a pair of respective apertures. Radio frequency energy is applied to the electrodes to establish a plasma.