The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 1990
Filed:
Sep. 19, 1988
Applicant:
Inventor:
Ikuo Hikima, Kawasaki, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01D / ; G01J / ;
U.S. Cl.
CPC ...
346108 ; 250226 ; 2502011 ;
Abstract
An exposure apparatus comprises a projection optical system, to project the image of an object on a first plane onto a second plane, a laser means for outputting a light beam to the projection optical system for projection, a measuring device for detecting a fluctuation of the optical characteristic of the projection optical system attributable to deviation of the wavelength of the light beam output from the laser and a control device responsive to the measuring device to adjust the wavelength of the light beam.