The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 1990
Filed:
Jan. 11, 1989
Applicant:
Inventors:
Kenji Saito, Tokyo, JP;
Ken Eguchi, Yokohama, JP;
Haruki Kawada, Kawasaki, JP;
Yoshinori Tomida, Yokohama, JP;
Toshihiko Miyazaki, Tokyo, JP;
Yukuo Nishimura, Sagamihara, JP;
Takashi Nakagiri, Tokyo, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B / ; G01N / ; B01J / ;
U.S. Cl.
CPC ...
350174 ; 356432 ; 422186 ;
Abstract
A film forming device includes an optical device which has a light source, and a first optical system for projecting light beams split by a light splitting device. The light splitting device and the optical system steadily maintain the intensity center of the light beam projected onto a detecting surface of a light detector at an invariable position without positional fluctuation independently of fluctuation of an emitting angle to a thin film of the light source.