The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 1990
Filed:
Aug. 05, 1988
Applicant:
Inventors:
Yukio Okamoto, Sagamihara, JP;
Toshiyuki Aida, Chofu, JP;
Katsuki Miyauchi, Hino, JP;
Kazumasa Takagi, Tokyo, JP;
Tokuumi Fukazawa, Tachikawa, JP;
Shinji Takayama, Mitaka, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05D / ; B05D / ; C23C / ;
U.S. Cl.
CPC ...
505-1 ; 505732 ; 505730 ; 427 62 ; 4271263 ; 427 38 ; 427 39 ; 427 42 ; 4272553 ;
Abstract
A process for fabricating a superconducting oxide thin film is disclosed which comprises the steps of separately evaporating metal elements, of which the superconducting oxide thin film with a desired stoichiometry is to be composed, to a substrate and simultaneously irradiating the substrate with oxygen plasma generated by RF wave or ECR microwave to form a crystalline oxide film without further annealing.