The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 1990
Filed:
Dec. 21, 1985
Applicant:
Inventors:
Cecil J Davis, Greenville, TX (US);
Robert T Matthews, Plano, TX (US);
Rudy L York, Plano, TX (US);
Joseph D Luttmer, Richardson, TX (US);
Dwain R Jakubik, Palmer, TX (US);
James B Hunter, Dallas, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118725 ; 118715 ;
Abstract
A processing apparatus and method wherein two separate gas feeds are provided in proximity to the face of a face down wafer. A shroud can be used to maximize mixing of the two gas feed streams without excessive residence time.
Published as:
Davis, Cecil. (1990). Processing apparatus and method (U.S. Patent No. 4949671). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4949671
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile