The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 1990
Filed:
Nov. 14, 1988
Applicant:
Inventors:
Wayne V Vogen, Oakland, CA (US);
Martin D Mannion, Santa Cruz, CA (US);
Assignee:
Amray Inc., , US;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250310 ; 250311 ; 250306 ; 250307 ;
Abstract
A method and system to reduce the sensitivity of instruments such as scanning electron microscopes to vibrations and similar disturbances. In the preferred embodiment, the system includes at least two velocity sensors connected to the specimen stage of the microscope to detect vibrations in two independent directions, integrators to integrate output signals from the velocity sensors to indicate displacement of the specimen stage in the two directions, and a beam steering device that receives signals from the integrators and adjusts the normal scanning pattern of the electron beam of the microscope to reduce the effect of vibrations.