The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 31, 1990
Filed:
Jan. 11, 1989
Applicant:
Inventor:
Akira Suzuki, Numazu, JP;
Assignee:
Toshiba Kikai Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
414217 ; 414331 ; 432 10 ; 432223 ;
Abstract
In a method and apparatus for depicting a circuit pattern on an article such as a semiconductor wafer, glass mask or a reticle supported by a stage in an evacuated casing with an electron beam, the article is disposed in a magazine contained in a sealable chamber communicated with the evacuated chamber. The article is contacted with a heat adjusting member to adjust the temperature thereof. After matching the level of the article with that of the stage, the article is loaded on the stage.