Charged particle beam scanning apparatus

Abstract

Scanning beam apparatus adapted to display two views of a surface for stereoscopic viewing, wherein two series of electrical signals are obtained by scanning the surface with a normal and then tilted beam characterized by a frame store (36) to which the two series of electrical signals are supplied, the frame store including a feedback loop and input and feedback multiplying means (38, 40) and forming a recursive filter, and signal converter means for (42) including a red/green/blue look-up table memory means for generating red/green/blue signals for display by a color monitor (44). Alternate tilting of the beam is achieved by adjusting during alternate scans the currents flowing in the gun alignment coils (12) of the SEM so as to shift the beam, and simultaneously introducing an offset in the signals applied to at least one other element (14 or 16) in the beam forming and focusing assembly, to counteract the shift introduced by the alignment adjustment, whereby the point of intersection of the beam axes follows the focal plane as focus is altered. The two video signals may be correlated to produce a correlation signal whose value for each point in the surface indicates the apparent shift in position of that point as between the normal and tilted beam scans, to produce a signal indicative for the surface topography. The correlating signal may be converted to a focusing control signal and may be enhanced by process for successive approximations.