The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 1990
Filed:
Jan. 17, 1989
Applicant:
Inventors:
Shinya Akamine, Stanford, CA (US);
Thomas R Albrecht, Stanford, CA (US);
Thomas E Carver, Mountain View, CA (US);
Assignee:
The Board of Trustees of the Leland Stanford University, Stanford, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
G01B / ; G01C / ; H01J / ; H01L / ;
U.S. Cl.
CPC ...
250306 ; 33556 ; 33558 ; 33561 ; 156647 ; 73105 ;
Abstract
Integral sharp tips on thin film cantilevers are produced by forming a rectangular silicon post on a (100) silicon wafer. Etching the top of the post leaves sharp silicon tips at the corners of what remains of the silicon post. A silicon dioxide cantilever with an integral tip is thermally grown over the silicon wafer and the sharp silicon tips.