The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 1990
Filed:
May. 23, 1989
H Thurman Henderson, Cincinnati, OH (US);
University of Cincinnati, Cincinnati, OH (US);
Abstract
A solid state microanemometer with improved sensitivity and response time is micromachined out of a single deep level doped semiconductor crystal and includes four corner supports interconnected to four spanning members which form the resistor legs of a Wheatstone bridge. The bottom of the supports are electrostatically bonded to a glass plate, thus thermally isolating the resistor legs a predetermined distance above the top surface of the plate and electrically isolating the supports. Electrically conductive material deposited on the four corner supports provides electrical contacts which enable a voltage to be applied across the resistor legs. Preferably, an n.sup.+ material is diffused into the region of the crystal located beneath the electrically conductive material, and the exposed surfaces of the crystal are sealed with a passivation layer.