The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 1990
Filed:
Jul. 26, 1989
Applicant:
Inventors:
John W Vorreiter, Sunnyvale, CA (US);
Robert L Dean, Castro Valley, CA (US);
Assignee:
The Perkin-Elmer Corporation, Norwalk, CT (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B65H / ;
U.S. Cl.
CPC ...
414217 ; 55154 ; 553852 ;
Abstract
Disclosed are passive electrostatic particle collectors (10 & 12) for use in vacuum chambers (24 & 32) especially for a particle beam machine system (30 & 36) to collect particulates, such as dust and debris, generated by moving parts (16) within such chambers (24 & 32). These electrostatic particle collectors (10 & 12) comprise Tourmaline crystals (12) mounted on a bracket plate (10) and strategically located where dust and debris are generated. Also disclosed is a method of removing particulate material in vacuum chambers generated by moving parts by passive electrostatic particle collectors.