The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 1990
Filed:
Jun. 20, 1989
Applicant:
Inventor:
Douglas H Burns, Santa Clara, CA (US);
Assignee:
Lasa Industries, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S / ;
U.S. Cl.
CPC ...
372 31 ; 372 13 ; 372 33 ; 372 26 ;
Abstract
A laser power beam control system includes a photodetector for generating an electrical signal which is proportional to the power level of the laser beam. The electrical signal is converted to a high frequency modulated signal which controls a single acousto-optical modulator. The acousto-optical modulator is in the laser beam path and controls the power level of the beam in response to the amplitude modulated signal. The system is particularly adapted to control a laser beam used in raster or vector scanning a laser for the formation of semiconductor integrated circuits.