The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 1990
Filed:
Jun. 22, 1988
Applicant:
Inventor:
Ahmet Erbil, Atlanta, GA (US);
Assignee:
Georgia Tech Research Corporation, Atlanta, GA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ; B05D / ;
U.S. Cl.
CPC ...
4272553 ; 4272552 ; 4272551 ; 427255 ; 4272481 ; 427 62 ; 427314 ; 505-1 ; 505734 ; 556 43 ; 556112 ; 556140 ;
Abstract
Mixed metal oxide films containing Group IIa metals and transition metals are deposited on a heated substrate by a chemical vapor deposition process using alkylcyclopentadienyl metal compound precursors and an oxidizing agent.