The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 1990
Filed:
Nov. 12, 1987
Leybold-Aktiengesellschaft, Hanau, DE;
Abstract
In an apparatus for coating a substrate with an organic substance by placing the substrate in a coating chamber containing a gaseous hydrocarbon compound, in which the hydrocarbon compound can be broken down by means of a cathode system having magnets, a plasma is formed in the vicinity of the substrate by applying a radiofrequency voltage to the cathode system while the substrate is held immediately in front of the cathode. The pressure in the coating chamber and the supply of the electric energy from the generator to the cathode are variable for the purpose of achieving a coating quality that will change during the build-up of the coating. For this purpose, electric motor-powered valve means are inserted into the gas supply line and into the pump suction line and are operated through a timing mechanism or a control apparatus which is connected to a vacuum gauge.