The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 24, 1990

Filed:

Apr. 19, 1989
Applicant:
Inventors:

Yutaka Tsuchiya, Shizuoka, JP;

Yoshihiro Takiguchi, Shizuoka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ; G01N / ;
U.S. Cl.
CPC ...
356417 ; 2502 / ; 356318 ; 356432 ;
Abstract

A high spatial and time resolution measuring apparatus for optically measuring a fine area in an object to be measured, the apparatus comprising a stage for mounting a specimen thereon, a light source for generating a first light, a first optical system for leading the first light from the light source to the specimen, an objective lens for magnifying an image of a second light from the specimen, a second optical system for imaging a part of the image in a form of a slit, a streak tube having a photocathode at a position of image formation of the second optical system for receiving the part of the image and forming a streak image thereof, a housing for shielding the first optical system, the objective lens and the second optical system from stray light.


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