The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 1990
Filed:
Aug. 17, 1988
Applicant:
Inventors:
Akira Mizoguchi, Osaka, JP;
Jun Shioya, Osaka, JP;
Yoichi Yamaguchi, Osaka, JP;
Yoshinobu Ueba, Osaka, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; B05D / ;
U.S. Cl.
CPC ...
20419231 ; 427 38 ;
Abstract
A carbon film having a larger electrical conductivity is produced on a substrate by an ion beam method comprising steps of ionizing an organic compound having at least one substituent selected from the group consisting of a carbonyl group, an aldehyde group, an acyl group, an acid anhydride group, an amino group, a nitro group, a hydroxyl group, an alkoxyl group, a thiol group and a halogen or a cluster of said organic compound with an ion beam which accelerates ionized species towards a substrate by an electric field and forming a carbon film on the substrate.