The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 1990
Filed:
Jun. 01, 1989
Applicant:
Inventors:
Gunter Reich, Cologne, DE;
William Worthington, Syracuse, NY (US);
Assignee:
Leybold Aktiengesellschaft, Hanau, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04D / ; G01M / ;
U.S. Cl.
CPC ...
4174234 ; 73 407 ; 415 90 ;
Abstract
Leak detecting device working on the counter current principle uses a test piece connected to the inlet of a first turbomolecular pump, a gas detector connected to the inlet of a second turbomolecular pump. First and second molecular pumps downstream of the respective turbomolecular pumps have a common outlet connected to a pre-vacuum pump and reduce the effect of test gas substratum. Both turbomolecular and other molecular pumps are on a common shaft, the passages between each turbomolecular and molecular pumping stage being connected.