The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 1990
Filed:
Jan. 13, 1989
Applicant:
Inventor:
Thomas E Carver, Mountain View, CA (US);
Assignee:
The Board of Trustees of the Leland Jr. University, Stanford, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
B32B / ; H01L / ; B44C / ; C03C / ;
U.S. Cl.
CPC ...
428139 ; 156644 ; 156647 ; 156651 ; 156653 ; 156657 ; 1566591 ; 1566611 ; 156662 ; 357 69 ; 428614 ; 428632 ; 428209 ; 437182 ; 437228 ; 437245 ;
Abstract
A microminiature tip and tip assembly is fabricated using microelectronic fabrication techniques. A masking aperture is formed in a dielectric layer which overlies a (100) silicon substrate. For a square aperture, a pyramidal pit is anisotropically etched into the surface of the silicon substrate. Tungsten is selectively deposited in the pit to form a pyramid-shaped microminiature point. Continued deposition of tungsten fills the aperture to form a base portion of the tip which integrally locks the tip to the dielectric layer, which is fabricated to form a support member for the tip.