The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 1990
Filed:
Jul. 22, 1986
Applicant:
Inventors:
Assignee:
Balzers Aktiengesellschaft, Furstentum, LI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20419231 ; 20429805 ; 427 38 ; 118723 ;
Abstract
A process for coating substrates which has microcavities comprises coating the substrate surface under a vacuum with a predetermined substance to form a layer of the substance deposited on the surface and in the cavity. Directing subsequent layers onto the substrate with an ion bombardment so as to cause the molecular beams of the coating substance to strike the cavities at divergence angles of not greater than 10.degree..